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Inficon Cygnus 2 Thin Film Deposition Controller manuály

Uživatelské manuály a uživatelské příručky pro Zařízení Inficon Cygnus 2 Thin Film Deposition Controller.
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Inficon Cygnus 2 Thin Film Deposition Controller Uživatelský manuál (274 strany)


Značka: Inficon | Kategorie: Zařízení | Velikost: 8.39 MB |

 

Tabulka s obsahem

OPERATING MANUAL

1

Trademarks

4

Disclaimer

4

Copyright

4

Warranty

7

Table Of Contents

9

TOC - 2

10

Chapter 2

10

Installation and Interfaces

10

Chapter 3

11

Operation

11

TOC - 4

12

Chapter 4

12

Sensor & Source Set-Up

12

Chapter 5

12

Material Set-Up

12

TOC - 5

13

TOC - 6

14

Chapter 9

14

Remote Communications

14

TOC - 7

15

TOC - 9

17

TOC - 10

18

1.1 Introduction

19

1.2 Cygnus 2 Safety

20

1.2.3 Earth Ground

22

1.2.4 Main Power Connection

23

1.3 How To Contact INFICON

24

1.4 Cygnus 2 Specifications

25

1.4.1 Measurement

25

1.4.2 Screens and Hierarchy

25

1.4.3 Cygnus 2 Features

26

1 - 10

28

1 - 11

29

1.4.4 ‘Display

30

1.4.5 DAC Outputs

31

1.4.6 Logic Processing

32

1.4.7 Relays / Inputs

32

1 - 15

33

1.4.14 Size

34

1.4.16 Weight

34

1.4.17 Cleaning

34

1.5 Unpacking and Inspection

35

1.6.1 Base Configurations

35

1.6.3 Optional Accessories

36

1.6.4 Oscillator Packages

36

1.6.5 Sensors

36

1.6.6 Replacement Cables

36

1 - 19

37

2.1 Location Guidelines

39

2.1.1 Sensor Types

39

2.1.2 Sensor Installation

39

2.1.3 Cygnus 2 Installation

42

. See Figure

43

2.3.1 Routing XIU Cables

45

I/O Board #1 I/O Board #2

48

I/O Board #3

48

Signal Name Pin EIA Name

49

TX Transmit Data 2 BA

49

RX Receive Data 3 BB

49

SG Signal Ground 5 AB

49

GND Shield Ground 1

49

2 - 12

50

3.1 Front Panel Controls

51

3.2 Rear Panel Interfaces

53

3.3 Displays

55

3.3.1 Main Menu Display

55

3.3.2 Operate

56

3.3.3 Sensor Information

58

3 - 10

60

3 - 11

61

Figure 3-7 Type/Freq display

61

3 - 12

62

3.3.4 Sensor Screen

63

3.3.5 Source

64

3.3.6 Material

65

3 - 16

66

3.3.7 General

67

3 - 18

68

3.3.8 Digital I/O

69

3.3.9 Logic

70

3.3.10 Maintenance

70

3.3.11 Counter / Timer

70

3.3.12 USB Storage

70

See Figure 3-16

71

3 - 22

72

3.4 State Descriptions

73

3 - 24

74

3.5 Special Features

75

3.5.1 Crystal Switching

75

3 - 26

76

3 - 27

77

3 - 28

78

3.5.3 Auto-Z

79

3.5.4 Rate Watcher

81

3.5.5 Handheld Controller

81

3.5.6 Test Mode

82

3.5.7 USB Storage Device

83

3.5.8 Lock and Access Codes

84

3.5.9 Datalog

85

3 - 36

86

3 - 37

87

Table 3-3 Sensor 1 to 6

87

3 - 38

88

3 - 39

89

3.5.10 DAC Monitoring

90

3.5.11 Trend Analysis

90

4.1.2 Sensor Parameters

92

4.2.1 Source Navigation

94

4.2.2 Source Parameters

95

5.1 Introduction

99

5.1.1 Material Overview Page

99

5.1.2 Material Definition

100

Cygnus 2 Operating Manual

101

Figure 5-4 Time constant

102

TOOLING TF

105

5 - 10

108

5 - 11

109

5 - 12

110

5 - 13

111

5 - 14

112

5 - 15

113

5 - 16

114

5.2.1 Skip Deposit

115

5 - 18

116

6.1 General Set-Up Overview

117

6.2 General Process Page

117

6.3 DACs Page Parameters

118

6.4 COMM Page Parameters

119

6.5 MESSAGE Page Set-up

121

6.6 DATE / TIME Set Up

122

6.7 TEST Page Set Up

123

6.8 LOCK Page Code Set-up

124

6 - 10

126

7.1 Digital I/O Screen

127

7.2 All Input Page

127

7.3 All Output Page

128

7.4 I/O Board Page

129

7.4.1 Output Type

129

8.1 Logic Statement Overview

131

8.2.1 Logic Statement Groups

133

8.3 IF Event Definitions

137

8 - 10

140

8 - 11

141

8 - 12

142

8 - 13

143

8.4 THEN Action Definitions

144

8 - 15

145

8 - 16

146

8.5 Logic Statement Example

147

8 - 18

148

9.2 Physical Connections

149

9.2.1 RS-232C Serial Port

149

9.2.2 TCP/IP Ethernet Port

150

Properties. See Figure 9-2

151

9.3 Message Format

153

9.3.1 Protocol

153

Table 9-1 Data type codes

155

9.4 Communication Commands

158

9.4.2 Status Commands

159

9.4.3 HELLO Command

159

9 - 12

160

QG

160

9 - 14

162

9 - 16

164

IPN 074-545-P1E

165

9 - 18

166

9 - 20

168

9.4.8 Query Sensor Parameter

169

9 - 22

170

9 - 24

172

9.4.14 Query Material Name

173

9.4.15 Update Material Name

173

9.4.16 Query Input Name

173

9.4.17 Update Input Name

173

9.4.18 Query Output Name

173

9.4.19 Update Output Name

174

9.4.20 Query Output Type

174

9.4.21 Update Output Type

174

9.4.22 Query User Message

174

9.4.23 Update User Message

175

9.4.24 Query Logic Statement

175

9.4.26 Cygnus 2 Event List

177

9 - 30

178

9 - 31

179

9 - 32

180

9.4.27 Cygnus 2 Action List

181

9 - 34

182

9.4.28 Status General

183

9 - 36

184

9 - 37

185

9.4.29 Status Material

186

9 - 39

187

9.4.30 Status Sensor

188

Command

188

9.4.31 Remote General Action

190

9 - 43

191

9 - 44

192

9 - 45

193

Table 9-16 Remote material

193

9 - 46

194

9 - 47

195

9 - 48

196

9 - 49

197

9 - 50

198

9 - 51

199

9 - 52

200

9 - 53

201

9 - 54

202

10.2 Determining Density

203

10.3 Determining Tooling

204

10 - 3

205

10.5 Source Maintenance

207

10 - 6

208

10.6 System Status

209

10 - 8

210

11.1 Introduction

211

11 - 2

212

Chapter 12

213

USB Storage

213

12.3 Configuration Files

214

12.4 Data Logs

215

12.5 Screen Captures

216

13.1 Status Messages

217

13 - 2

218

13.2 User Messages

220

13.3 STOP messages

221

13.4 Transient Messages

222

13 - 8

224

Maintenance

225

13.5 Input Error Messages

226

13.6 Troubleshooting Guide

227

13 - 12

228

13 - 13

229

13 - 14

230

13 - 15

231

13 - 16

232

13 - 17

233

13 - 18

234

13 - 19

235

13.7 Replacing the Crystal

236

13.7.1 Front Load

236

13.7.2 Cool Drawer

237

13 - 22

238

13.7.4 Bakeable Sensor

239

13.7.5 Sputtering Sensor

240

13.7.6 Crystal Snatcher

241

13.7.7 CrystalSix (XtalSix)

241

13.8 Crystal Sensor Emulator

242

IPN 760-601-G1 or 760-601-G2

242

13.8.1 Diagnostic Procedures

243

13 - 29

245

13.8.2 % XTAL Life

246

13 - 31

247

13.8.4 Specifications

248

14.1 Basics

249

14.1.1 Monitor Crystals

250

Frequency (in MHz)

251

14.1.3 Z-match Technique

253

14.1.4 Active Oscillator

254

14.1.5 ModeLock Oscillator

255

14 - 8

256

14.1.6 Auto-Z Theory

257

14.1.7 Control Loop Theory

259

[controller] [process]

261

A.1 Introduction

263

A - 10

272

Index - 1

273




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