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Inficon IC/5 Thin Film Deposition Controller manuály

Uživatelské manuály a uživatelské příručky pro Zařízení Inficon IC/5 Thin Film Deposition Controller.
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Inficon IC/5 Thin Film Deposition Controller Uživatelský manuál (312 strany)


Značka: Inficon | Kategorie: Zařízení | Velikost: 10.36 MB |

 

Tabulka s obsahem

OPERATING MANUAL

1

01/16/96

5

Warranty

7

Table Of Contents

9

TOC - 2

10

Chapter 2

10

Chapter 3

10

Operation

10

TOC - 3

11

TOC - 4

12

Chapter 7

12

Remote Communications

12

TOC - 5

13

TOC - 6

14

Chapter 11

14

Installation and Interfaces

14

Chapter 12

14

Calibration Procedures

14

Chapter 13

15

TOC - 8

16

Appendix A

16

Material Table

16

Chapter 1

17

1.2 Instrument Safety

18

1.2.3 Earth Ground

20

1.2.4 Main Power Connection

21

1.4 IC/5 Specifications

23

1.4.3 Set-Up Parameters

24

1.4.4 Display

26

1 - 11

27

1.4.6 Logic Processing

28

1.4.7 Relays / Inputs

28

1.4.8 Remote Communications

29

1.4.9 Accessories

29

1.4.10 Power

29

1 - 14

30

1.5 Unpacking and Inspection

31

1.6.3 Optional Accessories

32

1 - 17

33

1 - 18

34

1 - 19

35

1 - 20

36

2.1.1 Monitor Crystals

38

Frequency (in MHz)

39

2.1.3 Z-match Technique

41

crystal and

42

2.1.5 ModeLock Oscillator

43

2.1.6 Auto Z-match Theory

45

2.1.7 Control Loop Theory

47

[controller] [process]

50

2 - 16

52

3.2 Rear Panel Interfaces

55

3.3 Displays

57

(See Figure 3-5.)

60

3.3.2 Operate Display

61

3 - 10

62

3 - 11

63

3 - 12

64

3.3.3 Sensors Display

65

3 - 14

66

3 - 15

67

3 - 16

68

3 - 17

69

3 - 18

70

3 - 19

71

3.3.7 Program Displays

72

3 - 21

73

Figure 3-13 I/O Display

73

3.4 Process Description

74

3.4.2 Executing a Process

75

See Figure 3-15 and

76

Figure 3-16

76

3 - 25

77

3.4.4 Co-deposition

78

3.4.5 Automating a Process

79

3 - 28

80

3 - 29

81

3.5 State Descriptions

82

3.6 Special Features

84

3 - 33

85

3 - 34

86

3 - 35

87

3.6.3 Auto Z

88

3.6.5 Rate Watcher

89

3.6.6 Hand-Held Controller

90

3.6.7 Test Mode

91

3.6.8 Floppy Disk (Optional)

91

3.6.9 Lock and Access Codes

92

3.6.10 Datalog

92

3 - 42

94

Chapter 4

95

Material Set Up

95

Figure 4-3 Material Library

96

TOOLING TF

100

IC/5 Operating Manual

101

IC/5 Operating Manual

102

4 - 10

104

4 - 11

105

4 - 12

106

4 - 13

107

4 - 14

108

4 - 15

109

4 - 16

110

Chapter 5

111

Process Set-Up

111

5.2 Process Definition

112

5.2.1 Layer Editing

113

5.5.1 Skip Deposit

119

5 - 10

120

Chapter 6

121

I/O Logic Statement Set-Up

121

Figure 6-4

125

6.3 ’IF’ Event Definitions

126

6 - 10

130

6 - 11

131

6 - 12

132

6 - 13

133

6 - 14

134

6.5 Logic Statement Example

135

6.6 I/O Map Directory

136

6.7 Define User Messages

137

6 - 18

138

6.8 Floppy Disk

139

6 - 20

140

6.9 Error Messages in I/O

141

Logic Statement Set-Up

141

6 - 22

142

Key Function Description

144

7.3 Error Messages in

146

7.5 Physical Connections

146

7.5.1 RS-232C Serial Port

147

7.5.2 IEEE488 Port

149

7.6 Message Protocols

150

(command)<ACK>

151

(response)<ACK> or

151

(nrc)<NAK>

151

7.7 INFICON Standard

152

Communication Commands

152

7.7.3 Query Commands

153

7 - 12

154

7 - 13

155

7 - 14

156

7 - 15

157

7 - 17

159

7.7.4 UPDATE Commands

160

7 - 19

161

7 - 20

162

7 - 21

163

7 - 22

164

7 - 23

165

7 - 25

167

7 - 26

168

7 - 27

169

7.7.5 STATUS Commands

170

IPN 074-237AE

171

7 - 30

172

7 - 32

174

7 - 34

176

7 - 36

178

7.7.6 REMOTE Commands

180

7 - 39

181

7 - 40

182

Host Programs

183

7 - 42

184

7.8.2 Sample Host Programs

185

7 - 44

186

7 - 46

188

Chapter 8

189

Source/Sensor Set-Up

189

8.2 Source/Sensor Navigation

190

8.3 Source Parameters

191

8.4 Sensor Parameters

194

8 - 10

198

Chapter 9

199

Utility Set-Up

199

9.2 Utility Navigation

200

9.3 Utility Parameters

200

Chapter 10

207

Applications

207

Multiple Sensor Operation

208

10 - 3

209

10.2 Trend Analysis

210

10 - 5

211

10 - 6

212

10 - 7

213

10.3.1 System Equipment List

214

10 - 9

215

10.3.2 I/O Set-Up

216

10 - 11

217

10 - 12

218

10 - 13

219

Figure 10-5 I/O Map Board 2

219

10 - 15

221

Figure 10-6 Statement 1

221

Figure 10-7 Statement 2

221

10 - 16

222

10 - 18

224

10 - 20

226

10 - 22

228

10 - 23

229

Figure 10-35 Statement 31

229

Figure 10-36 Statement 32

229

Figure 10-37 Statement 33

229

10 - 24

230

10 - 26

232

11 - 2

234

11.1.2 Sensor Installation

235

11 - 4

236

11 - 5

237

11 - 6

238

11 - 8

240

11.3.2 Voltage Selection

241

11.3.3 Routing XIU Cables

242

11 - 11

243

I/O Board #1 I/O Board #2

244

I/O Board #3

244

11 - 13

245

11 - 14

246

12.3 Determining Tooling

248

12 - 3

249

For Co-Deposition

250

12 - 5

251

12.5.1 Procedure Set-Up

252

12 - 7

253

12 - 8

254

12 - 10

256

12.6 AutoTuning

257

12.6.1 AutoTune Parameters

258

12 - 13

259

AutoTune Description

260

12 - 15

261

12 - 16

262

12 - 17

263

12 - 18

264

13 - 2

266

13 - 3

267

13 - 4

268

13 - 5

269

13 - 6

270

13 - 7

271

13 - 8

272

13 - 9

273

13 - 10

274

13.2 Troubleshooting Guide

275

13 - 12

276

13 - 13

277

13 - 14

278

13 - 15

279

13 - 16

280

13 - 17

281

13 - 18

282

13 - 19

283

13 - 20

284

13 - 21

285

13 - 22

286

13.3 Replacing the Crystal

287

13 - 24

288

13.3.3 Bakeable Sensor

289

13.3.4 Sputtering Sensor

290

13.3.5 Crystal Snatcher

291

13.3.6 CrystalSix

291

13.4 Crystal Sensor Emulator

292

IPN 760-601-G1 or 760-601-G2

292

13.4.1 Diagnostic Procedures

293

13 - 31

295

13.4.2 % XTAL Life

296

13 - 33

297

13.4.4 Specifications

298

A - 10

308

Index - 1

309

Index - 3

311

Index - 4

312




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