Inficon TM-400 Thin Film Deposition Monitor Uživatelský manuál Strana 1

OPERATION AND SERVICE MANUALTM-350/400Thickness Monitor178800 Rev. B

TOC - 2 IPN 178800 Rev. B TM-350/400 Operating ManualChapter 3Unpacking and Inspection3.1 Introduction. . . . . . . . . . . . . . . . . . . . . . . .

TOC - 3IPN 178800 Rev. BTM-350/400 Operating ManualChapter 6Sensor Crystal Replacement6.1 Introduction. . . . . . . . . . . . . . . . . . . . . . .

TOC - 4 IPN 178800 Rev. B TM-350/400 Operating Manual10.6 Data Types. . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . . .

1 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 1Safety Precaution and Preparation for Use1.1 Input Power RequirementsThe TM Series Thickn

1 - 2 IPN 178800 Rev. B TM-350/400 Operating Manual1.5 Line FusesThere are two 5 x 20 mm fuses mounted inside the power entry module. They are acces

2 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 2General Description2.1 IntroductionThe Thickness Monitor allows improved manual control o

2 - 2 IPN 178800 Rev. B TM-350/400 Operating Manual2.2.3 Parameter DisplayThe Film Density, Tooling Factor, and Acoustic Impedance parameters are in

2 - 3IPN 178800 Rev. BTM-350/400 Operating Manual2.2.11 Dynamic Measurement Update RateThe Monitor utilizes a dynamic updating scheme where the upd

2 - 4 IPN 178800 Rev. B TM-350/400 Operating Manual2.3.4 Program ParametersFilm Number. . . . . . . . . . . . . . . . . . . 100 Programmable films T

2 - 5IPN 178800 Rev. BTM-350/400 Operating ManualFigure 2-1 TM-400 Outline

2 - 6 IPN 178800 Rev. B TM-350/400 Operating ManualFigure 2-2 TM-400R Outline

2 - 7IPN 178800 Rev. BTM-350/400 Operating Manual2.4 AccessoriesTable 2-1 AccessoriesPart Number Description179217 IEEE-488 Communication Board 1

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3 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 3Unpacking and Inspection3.1 IntroductionCarefully inspect your Monitor and its shipping c

3 - 2 IPN 178800 Rev. B TM-350/400 Operating Manualthe "Input" end of the Oscillator to the atmosphere side of the Feedthrough. Use the 30&

3 - 3IPN 178800 Rev. BTM-350/400 Operating Manual3.3.2 RS-485 Option 1 Remove the chassis top cover. 2 Locate the IC socket labeled U1. It is on th

3 - 4 IPN 178800 Rev. B TM-350/400 Operating ManualFigure 3-1 TM-350 Front Panel

3 - 5IPN 178800 Rev. BTM-350/400 Operating ManualFigure 3-2 TM-400 Front Panel with Descriptions

3 - 6 IPN 178800 Rev. B TM-350/400 Operating ManualFigure 3-3 TM-400 Rear Panel with descriptions

3 - 7IPN 178800 Rev. BTM-350/400 Operating ManualFigure 3-4 Output Connector Table 3-1 Output Connector Pin AssignmentsPin Number Signal1Sensor Sh

OPERATION AND SERVICE MANUALTM-350/400Thickness Monitor178800 Rev. Bwww.inficon.com [email protected] to our continuing program of product i

3 - 8 IPN 178800 Rev. B TM-350/400 Operating ManualFigure 3-5 Input ConnectorTable 3-2 nput Connector Pin AssignmentsPin Number Signal1Start2Stop3

3 - 9IPN 178800 Rev. BTM-350/400 Operating ManualFigure 3-6 IEEE-488 ConnectorTable 3-3 IEEE-488 Pin AssignmentsPin Number Signal1 DATA I/O 12 DAT

3 - 10 IPN 178800 Rev. B TM-350/400 Operating ManualFigure 3-7 D9S DTE Rear-panel RS-232 male connector Table 3-4 D9 Rear Panel RS-232/RS-485 Conne

3 - 11IPN 178800 Rev. BTM-350/400 Operating ManualFigure 3-8 DAC socket connectorTable 3-5 DAC System Interface Connector Pin AssignmentsPin Numbe

3 - 12 IPN 178800 Rev. B TM-350/400 Operating ManualFigure 3-9 TM-400 Top View (Cover Removed)

4 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 4Monitor Installation4.1 Monitor Installation Precautions 4.1.1 Proper Grounding The Moni

4 - 2 IPN 178800 Rev. B TM-350/400 Operating Manual4.2.2 IEEE-488 Option Board (optional) The optional IEEE-488 interface provides the TM-350/400 wi

4 - 3IPN 178800 Rev. BTM-350/400 Operating ManualFigure 4-1 Power Entry Module WARNING - Risk Of Electric ShockTo avoid electrical shock or persona

4 - 4 IPN 178800 Rev. B TM-350/400 Operating Manual4.3 Internal DIP Switches On the back of the display board (shown in Figure 3-9 on page 3-12) are

4 - 5IPN 178800 Rev. BTM-350/400 Operating Manual4.3.2 Computer Interface Address The TM-350/400 allows for computer interfaces between 1 and 32 fo

TrademarksThe trademarks of the products mentioned in this manual are held by the companies that produce them.Microdot® is a registered trademark of M

4 - 6 IPN 178800 Rev. B TM-350/400 Operating Manual4.3.3 DAC The TM-350/400 has two DAC output channels. One output is for rate and one is for thick

4 - 7IPN 178800 Rev. BTM-350/400 Operating Manual4.3.7 S16 Switch Settings 4.3.8 DAC Range SettingsFor more detail information on the DAC, see sec

4 - 8 IPN 178800 Rev. B TM-350/400 Operating Manual4.4 Monitor Cover Removal WARNING - Risk Of Electric ShockUnder no circumstances should the Monit

4 - 9IPN 178800 Rev. BTM-350/400 Operating ManualFigure 4-2 Typical System Installation

4 - 10 IPN 178800 Rev. B TM-350/400 Operating ManualFigure 4-3 Recommended Grounding Method Star Washers are recommended to be use in between the fr

5 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 5Sensor, Feedthrough and Oscillator5.1 Sensor Head Description The Sensor head is designed

5 - 2 IPN 178800 Rev. B TM-350/400 Operating ManualThe water-cooling tube connects to the feedthrough by brazing or vacuum couplings. If necessary, b

6 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 6Sensor Crystal Replacement6.1 IntroductionThe Sensor Head is designed for easy sensor cry

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7 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 7Operation7.1 Front Panel Displays The TM-350 display consists of a 4 digit Thickness disp

DECLARATION OF CONFORMITY This is to certify that this equipment, designed and manufactured by: INFICON Inc. Two Technology Place

7 - 2 IPN 178800 Rev. B TM-350/400 Operating ManualStart Key Sets the thickness display to zero, opens the source shutter and sets the active crystal

7 - 3IPN 178800 Rev. BTM-350/400 Operating ManualThe Modify up and Modify down keys are only active when a parameter is being displayed. The paramet

7 - 4 IPN 178800 Rev. B TM-350/400 Operating ManualCorrecting the cause of the failure then pressing the Stop key clears a crystal failure. A crystal

7 - 5IPN 178800 Rev. BTM-350/400 Operating ManualBoth of the rate and the thickness DAC range selections work the same. Table 7-2 shows the settings

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8 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 8Theory of Operation8.1 Basic MeasurementThe TM-350/400 uses a quartz crystal as the basic

8 - 2 IPN 178800 Rev. B TM-350/400 Operating ManualImprovements in sensor crystals and oscillator circuits resulted in a significant increase in achi

8 - 3IPN 178800 Rev. BTM-350/400 Operating ManualThe use of microprocessors allows an equation as complex as equation 3 to be solved economically an

8 - 4 IPN 178800 Rev. B TM-350/400 Operating Manual8.4 Rate CalculationThe deposition rate is calculated by dividing the change in thickness between

9 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 9Establishing The Deposition Parameters9.1 IntroductionThe following is a guide to establi

9 - 2 IPN 178800 Rev. B TM-350/400 Operating Manual9.3 Sensor Number (TM-400 Only) The Sensor Number parameter defines the primary sensor for the fi

9 - 3IPN 178800 Rev. BTM-350/400 Operating Manual9.6 Empirical Calibration If the density and acoustic impedance of the film material is known, the

9 - 4 IPN 178800 Rev. B TM-350/400 Operating Manual5 Alternating between the TOOLING FACTOR and the Modify up and Modify down key, follow the procedu

9 - 5IPN 178800 Rev. BTM-350/400 Operating ManualCadmium Telluride CdTe 5.85 9.01 Calcium Ca 1.55 3.37 Calcium Fluoride CaF2 3.18 11.39 Car

9 - 6 IPN 178800 Rev. B TM-350/400 Operating ManualLithium Fluoride LiF 2.64 11.41 Magnesium Mg 1.74 5.48 Magnesium Fluoride MgF2 3.0 13.86

9 - 7IPN 178800 Rev. BTM-350/400 Operating ManualTantalum (IV) Oxide Ta2O5 8.2 29.43 Tellurium Te 6.25 9.81 Terbium Tb 8.27 13.38 Thallium

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10 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 10Computer Interface10.1 GeneralThe various computer interfaces of the INFICON TM-350/400

10 - 2 IPN 178800 Rev. B TM-350/400 Operating Manualrear panel used for RS-232. The pin layout is shown in Figure 3-7 on page 3-10 and Table 3-4 on p

10 - 3IPN 178800 Rev. BTM-350/400 Operating ManualIf the sum of all bytes occupies more than one byte, a single byte checksum can be generated using

INFICON warrants the product to be free of functional defects in material and workmanship and that it will perform in accordance with its published sp

10 - 4 IPN 178800 Rev. B TM-350/400 Operating Manual10.8 Instruction Summary Table 10-2 is a list of valid instruction codes. Table 10-1 Receive Co

10 - 5IPN 178800 Rev. BTM-350/400 Operating Manual10.9 Instruction Descriptions The following is a description of the valid instructions along with

10 - 6 IPN 178800 Rev. B TM-350/400 Operating Manual3. Send film parameters (Code #2)Instructs the monitor to send the parameters for film # n to the

10 - 7IPN 178800 Rev. BTM-350/400 Operating Manual5. Send monitor status (Code #4)Instructs the monitor to send the status data. The description of

10 - 8 IPN 178800 Rev. B TM-350/400 Operating Manual6. Automatic Data Logging of String Values (Code #5)This instruction allows the computer to setup

10 - 9IPN 178800 Rev. BTM-350/400 Operating Manual7. Automatic Data Logging of Binary Values (Code #6)This instruction allows the computer to setup

10 - 10 IPN 178800 Rev. B TM-350/400 Operating ManualWhere the period value is converted from the four byte binary data as shown in the example above

11 - 1IPN 178800 Rev. BTM-350/400 Operating ManualChapter 11Repair and Maintenance11.1 Handling PrecautionsIntegrated Circuits (I.C.’s) can be dama

11 - 2 IPN 178800 Rev. B TM-350/400 Operating Manual11.3 Self Test Failure Detection The Monitor's self test features detect several system fai

11 - 3IPN 178800 Rev. BTM-350/400 Operating Manual11.3.2 RAM Failure (I FAIL) In the case of a failure in the Monitor's data memory or RAM, th

11 - 4 IPN 178800 Rev. B TM-350/400 Operating Manual11.4 Troubleshooting Aids To Isolate Installation Faults The following table describes possible

11 - 5IPN 178800 Rev. BTM-350/400 Operating ManualTable 11-2 Table 10-1 Troubleshooting AidsSymptom Possible CauseInstrument blows line fuse. a) L

11 - 6 IPN 178800 Rev. B TM-350/400 Operating Manual11.5 How To Contact Customer SupportWorldwide support information regarding: Technical Support,

TOC - 1IPN 178800 Rev. BTM-350/400 Operating ManualTable Of ContentsChapter 1Safety Precaution and Preparation for Use1.1 Input Power Requirements.