Inficon T-Guard Leak Detection Sensor Interface descriptio Uživatelský manuál stáhnout pdf (Strana 15)

RS232 ASCII Interface Protocol 15

jins85e1 2.fm Interface Description(1101)

Command

word1

Command

word2

Command

word3

Parameter Statement Read

Set

Example Response

*IDN identification of the unit –

:DEVice name of the unit R *IDN:DEV? T-Guard

:VERsion Software version R *IDN:VER? 1.30.00

:SERial serial number of the unit R *IDN:SER? <11 digits>

:WiseSerial serial number of the WISE Technology

Sensor

R *IDN:WS? <11 digits>

*PURGE Purge the measurement line with valves in

GROSS configuration, may stop with

Warning 45.

:START Start Purge S *PURGE:START OK

:STOP Stop Purge S *PURGE:STOP OK

*MEASure –

:Pressure –

:FOREline: pre-vacuum pressure (in actual unit) R *MEAS:P:FORE? 268

:FILTER filtered sensor current R *MEAS:FILTER? 2.16E-10 A

:TEMPeratur :Electronic temperature of the electronics inside the unit

(in °C)

R *MEAS:TEMP:E 41.5

*READ read leak rate in set unit

(if there is no valid value the result is 1.0,

without unit)

R *READ? 2.50E-4 mbar*l/s

<unit> unit = sccm; mbar*l/s; Pa*m3/s; atm*cc/s;

Torr*l/s

(if there is no valid value the result is 1.0,

without unit)

*READ mbar*l/s?

*READ Pa*m3/s?

2.50E-4 mbar*l/s

2.50E-5 Pa*m3/s

*STANDBY valves V1, V2 and V3 are closed; sensor

operates at low pressure

S *STANDBY OK

:STOP Stops Standby. Puts back valves in previous

position.

S *STANDBY:STOP OK

*START start measurement (and wake up from

standby if necessary)

S *START OK

1 2 ... 10 11 12 13 14 15 16 17 18 19 20 ... 39 40

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