Inficon Front Load Single Sensor Uživatelský manuál Strana 21
- Strana / 90
- Tabulka s obsahem
- ŘEŠENÍ PROBLÉMŮ
- KNIHY
- Front Load Single and Dual 1
- Trademarks 4
- Disclaimer 4
- Copyright 4
- Warranty 5
- Table Of Contents 7
- Chapter 5 9
- Troubleshooting 9
- TOC - 4 10
- Chapter 1 11
- Introduction 11
- 1.3 How to Contact INFICON 12
- 1.4 Unpacking and Inspection 13
- PN 074-156N 14
- Figure 1-4 Standard sensor 16
- 1.5.1 Specifications 17
- 1.5.2 Materials 18
- 1.5.4 Single Sensor Drawings 19
- 1.6.1 Specifications 24
- 1.6.2 Materials 25
- 1.6.4 Dual Sensor Drawings 26
- 1.7.1 Specifications 29
- 1.8 Feedthroughs 33
- 1.8.3 Feedthrough Drawings 35
- Dimensions are shown 36
- PN 750-420-G1 Solenoid Valve 37
- 6.73 (0.26) Diameter 40
- Six holes equally spaced 40
- 0.26 (6.73) Diameter 43
- Deposition Controller 47
- or STM-2 Deposition Monitor 49
- 2.1.4 Sensor Shutter Check 50
- (25.4 cm (10 in.) minimum) 51
- Obstruction 52
- 2.3.1 Tube Bending 56
- Chapter 3 59
- 3.4 Pneumatic Connections 62
- 3.5 Electrical Connections 62
- 3.6 Solenoid Valve Drawings 62
- Figure 3-2 Solenoid valve 63
- Chapter 4 65
- Maintenance and Spare Parts 65
- 4.3 Sensor Maintenance 69
- Figure 4-8 Lubrication guide 73
- 5.1.1 Symptom, Cause, Remedy 77
- 5.1.2 Digital Multimeter 79
- Figure 5-1 Resistance check 80
- Figure 5-4 Leaf spring 83
- In-Vacuum 87
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